中圖分類號：TN711.5 文獻標志碼：A DOI: 10.16157/j.issn.0258-7998.244981
中文引用格式： 祁建華，馬詩旻，何桂玲. 數(shù)字孿生在半導體測試設備中的實踐[J]. 電子技術應用，2024，50(9)：25-30.
英文引用格式： Qi Jianhua，Ma Shimin，He Guiling. The practice of digital twinship in semiconductor testing equipment[J]. Application of Electronic Technique，2024，50(9)：25-30.

The practice of digital twinship in semiconductor testing equipment

Abstract： Digital twin is an essential technology in smart manufacturing and has practical value in factories. At a semiconductor testing services company, a digital twin system was used to collect over 200 000 alarm data points from probe stations. The analysis showed that more than 90% of the alarms were resolved remotely using the digital twin system. To improve the digital twin model and alarm management, alarms were replicated within the model by simulating different scenarios. Operating the digital twin system manually reduced equipment downtime by over 64% compared to traditional methods. Additionally, using an AI backend to automatically operate the digital twin system further reduced equipment waiting time by 78%. This highlights the importance of personnel response time to equipment alarms in affecting equipment downtime. Therefore, enhancing the use of digital twin models for automated alarm handling can significantly reduce equipment downtime and improve overall equipment utilization.

Key words : digital twin；semiconductor testing equipment；remote control；alarm handling；automation